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Laser induced chemical vapor deposition of carbon

 

作者: G. Leyendecker,   D. Ba¨uerle,   P. Geittner,   H. Lydtin,  

 

期刊: Applied Physics Letters  （AIP Available online 1981）
卷期: Volume 39, issue 11  

页码: 921-923

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92607

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Initial results on laser‐induced chemical vapor deposition using the visible radiation of an Ar+laser are presented. Due to the smaller wavelength of Ar+laser radiation in comparison to the infrared radiation of a CO2laser used in earlier experiments, much finer patterns could be produced. The influence of laser irradiance on the deposition rate and widths of patterns was investigated.

 

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