Measurements of catalytic efficiency of surfaces for the removal of atomic oxygen using NO*2continuum
作者:
Sunil Wickramanayaka,
S. Meikle,
T. Kobayashi,
N. Hosokawa,
Y. Hatanaka,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 2999-3002
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577163
出版商: American Vacuum Society
关键词: RECOMBINATION;OXYGEN MOLECULES;NITROGEN DIOXIDE;COPPER;TEFLON;HYDROGEN MOLECULES;NITROGEN MOLECULES;ALUMINIUM;REMOVAL;CATALYTIC EFFECTS;PLASMA−WALL INTERACTIONS;Al;Cu
数据来源: AIP
摘要:
The wall recombination coefficient (γ) of several materials for atomic oxygen was measured introducing a new method based on the NO*2continuum in a discharge‐flow system. This method has many advantages, such as the ability of measuring γ under different pressures, nonessentiality of measuring absolute atom concentrations, simplicity of experimental technique, etc. over the previous methods. Investigated materials in this work were selected specially considering the feasibility of industrial applications of plasmas. Although a few metals show slight differences, most of the calculated values of γ are in agreement with the literature values. Observed γ for Al and Al based materials were in the order of 10−3. The highest and lowest γ measured were of Cu and teflon, as 2.6×10−2and 7.3×10−5, respectively.
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