Cesium‐Ion Bombardment of Aluminum Oxide in a Controlled Oxygen Environment
作者:
E. H. Hasseltine,
F. C. Hurlbut,
N. Thomas Olson,
Harold P. Smith,
期刊:
Journal of Applied Physics
(AIP Available online 1967)
卷期:
Volume 38,
issue 11
页码: 4313-4316
ISSN:0021-8979
年代: 1967
DOI:10.1063/1.1709120
出版商: AIP
数据来源: AIP
摘要:
Sputtering of aluminum oxide (sapphire) by 2.5 to 10 keV cesium ions has been investigated using neutron activation analysis. The sputtering yield (aluminum atoms/ion) was measured as a function of ion energy, target temperature, andR, the ratio of background oxygen molecular flux arriving at the target surface to the sputtered aluminum and oxygen flux leaving the surface. Positive‐charge accumulation on the dielectric surface was neutralized by electron flooding of the ion‐beam area while the ion current was measured by a periodic beam deflection technique. In all measurements the ion beam was normal to the target surface and the (001) crystallographic plane. The yield increased monotonically from 0.40 (aluminum atoms/ion) at 2.5 keV to 0.52 at 10 keV and was unaffected forR<0.1. The yield decreased slightly asRwas increased, and forR>10 it approached the saturation value of monocrystalline aluminum. The yield exhibited a temperature dependence decreasing from 0.55 at 77°K to 0.48 at 475°K. The results were reproducible to within 5%.
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