The Measurement of Thin Film Thicknesses in Normally Inaccessible Locations with the Scanning Electron Microscope
作者:
S. R. Floyd,
R. J. Anstead,
期刊:
Review of Scientific Instruments
(AIP Available online 1970)
卷期:
Volume 41,
issue 6
页码: 824-826
ISSN:0034-6748
年代: 1970
DOI:10.1063/1.1684657
出版商: AIP
数据来源: AIP
摘要:
A method of using the scanning electron microscope (SEM) to measure the thickness of thin films in inaccessible locations is described. Emphasis is placed on the calibrations of the SEM necessary to obtain good reproducible data and comparisons are made between thickness measurements made using the SEM and interferometric techniques. Actual measurements in the 10 000–15 000 Å range have been made with errors of 2–5%.
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