A simple, inexpensive device for ion‐bombardment cleaning of samples in ultrahigh vacuum

 

作者: V. M. Bermudez,   R. E. Thomas,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1983）
卷期: Volume 1, issue 3  

页码: 1557-1558

 

ISSN:0734-2101

 

年代: 1983

 

DOI:10.1116/1.572187

 

出版商: American Vacuum Society

 

关键词: ultrahigh vacuum;surface cleaning;sputtering;ion collisions;gallium arsenides;argon ions;collisions

 

数据来源: AIP

 

 

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