Polycrystalline thin films of SrTiO3—SrZrO3solid solutions were prepared along a new wet-chemical deposition route using β—diketone and propandiole as chelating agents. The structural properties of the films were studied by X-ray diffraction analysis, scanning and transmission electron microscopy. The thin film density was correlated with the permittivity using Maxwell's dispersion rule. The temperature coefficient of the capacitance as well as the dielectric losses were studied. Using transient impedance analysis, the dielectric relaxation, leakage, and resistance degradation of the thin films were investigated with respect to the Ti/Zr ratio.