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Ferroelectric-based microactuators

 

作者: WilliamP. Robbins,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1995)
卷期: Volume 11, issue 1-4  

页码: 179-190

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508013590

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

This paper reviews the current state of ferroelectric-based microactuators. The advantages of ferroelectric-based microactuation are considered. Several actuator concepts are discussed including unimorph-based cantilever actuators, membrane-based micropumps, linear positioning actuators using folded geometries of cascaded elementary actuators for both in-plane and out-of-plane displacements, linear stepper motors using inch-worm geometries, and ultrasonic-based micromotors. Optimistic, order-of-magnitude estimates of actuator performance are given based on simple, idealized analysis. Processing issues in fabricating ferroelectric-based microactuators are also considered.

 

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