Novel fiber growth on Ar+‐sputtered InP
作者:
F. Okuyama,
J. Kato,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 5
页码: 3054-3056
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587559
出版商: American Vacuum Society
关键词: INDIUM PHOSPHIDES;SPUTTERING;ARGON IONS;KEV RANGE 01−10;TEMPERATURE RANGE 273−400 K;AMORPHOUS STATE;CRYSTALLIZATION;FIBERS
数据来源: AIP
摘要:
Fiberlike protrusions with a novel structure were found to grow on monocrystalline InP sputtered with 1–3 keV Ar+at 100 °C. The fibers, which lengthened toward the incident ion beam, were of amorphous InP, except at the tip area receiving the highest ion‐flux density. The tip area, including the growth front, was comprised of In and InP single crystals, the In crystals forming topotaxially in the core of the very tip. The crystallization at the tip of these fibers was no doubt attributable to the impact of Ar+ions, so it may be termed a case of ‘‘ion‐induced crystallization,’’ which is an inverse process of the ion‐induced amorphization of crystalline semiconductors.
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