Improved electronic properties of GaAs surfaces stabilized with phosphorus
作者:
P. Viktorovitch,
M. Gendry,
S. K. Krawczyk,
F. Krafft,
P. Abraham,
A. Bekkaoui,
Y. Monteil,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 21
页码: 2387-2389
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.104879
出版商: AIP
数据来源: AIP
摘要:
We report on a new passivation procedure of the GaAs surface based on a thermal treatment under a PH3overpressure. This treatment results, by As/P exchange, in the formation of a thin superficial GaP layer which prevents the formation of an arsenic oxide, as observed by x‐ray photoelectron spectroscopy analysis. Subsequent increase of the photoluminescence signal indicates improved electronic properties of GaAs surfaces as a result of this passivation procedure.
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