首页   按字顺浏览 期刊浏览 卷期浏览 Low temperature metal induced crystallization of amorphous silicon using a Ni solution
Low temperature metal induced crystallization of amorphous silicon using a Ni solution

 

作者: Soo Young Yoon,   Ki Hyung Kim,   Chae Ok Kim,   Jae Young Oh,   Jin Jang,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 11  

页码: 5865-5867

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.366455

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Amorphous silicon (a-Si) was crystallized by metal-induced crystallization (MIC) using a Ni standard absorption solution. The a-Si films spin-coated with a 5000 ppm Ni solution were crystallized at as low as 500 °C. Needlelike morphology, developed as a result of the migration of NiSi2precipitates, appears in the MIC poly-Si. The growth of the needlelike crystallites proceeds to a direction parallel to⟨111⟩. The a-Si can be fully crystallized at 500 °C for 20 h. ©1997 American Institute of Physics.

 

点击下载:  PDF (172KB)



返 回