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Investigation of optical and electrical properties of ZnO ultrafine particle films prepared by direct current gas discharge activated reactive method

 

作者: Dachun Zhao,   Xiaoren Pan,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1994）
卷期: Volume 12, issue 5  

页码: 2880-2883

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587207

 

出版商: American Vacuum Society

 

关键词: ZINC OXIDES;MICROPARTICLES;GRANULAR MATERIALS;THIN FILMS;WORK FUNCTIONS;INFRARED SPECTRA;ELECTRIC DISCHARGES;TEMPERATURE DEPENDENCE;TEMPERATURE RANGE 0400−1000 K;PRESSURE EFFECTS;PHOTOCONDUCTIVITY;ZnO

 

数据来源: AIP

 

摘要:

The electrical and optical properties of ZnO ultrafine particle (UFP) films prepared by a new dc gas discharge activated reactive deposition technique were investigated. IR spectra and work function were used to study the samples. The results show that ln σ vs 1000/Taccords with the Arrhenius equation at 227–300 °C, the absorption edge is near 480 nm, IR eigen absorption peaks of ZnO (UFP) films shift to high energy (short wavelength) with decreasing particle size. The work function changes with gas pressure was discussed.

 

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