AIGaAs/GaAs V‐Groove channeled substrate buried heterostructure laser diodes
作者:
Jiahn‐Ann Chen,
Si‐Chen Lee,
Hao‐Hsiung Lin,
期刊:
Journal of the Chinese Institute of Engineers
(Taylor Available online 1985)
卷期:
Volume 8,
issue 3
页码: 311-316
ISSN:0253-3839
年代: 1985
DOI:10.1080/02533839.1985.9676835
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Channeled substrate buried (CSB) heterostructure laser diodes have been developed successfully. To fabricate CSB lasers a two‐step liquid‐phase epitaxial (LPE) growth in conjunction with the standard etching techniques was required. The first step of the LPE process was to grow ap‐type GaAs internal current confining layer on then‐GaAs substrate, followed by the etching of parallel V‐grooves along the [011] direction. The second LPE process was to grow a four‐layer laser structure over the V‐grooves. Due to the smoothing effect, an active layer with a crescent‐shaped cross section was formed. Because of the undercutting effect during the etching process, the active layer became very wide, i. e.,∼25μm. This resulted in a far‐field pattern along the junction plane with multifilaments. Each filament had a full angle at half maximun of 8∼10°. The smallest threshold current was found to be 0.88 A, which corresponds to a threshold current density of 8 KA/cm2. Its mode profile was in the range of 8,360 Å to 8,400 Å.
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