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Electron gun for producing a low energy, high current, and uniform flux electron beam

 

作者: Jong‐Liang Lin,   J. T. Yates,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1994）
卷期: Volume 12, issue 5  

页码: 2795-2797

 

ISSN:0734-2101

 

年代: 1994

 

DOI:10.1116/1.578976

 

出版商: American Vacuum Society

 

关键词: ELECTRON GUNS;DESIGN;PERFORMANCE;ULTRAHIGH VACUUM;CONTAMINATION;ENERGY RANGE;ELECTRON STIMULATED DESORPTION

 

数据来源: AIP

 

摘要:

A low energy electron gun to provide a uniform electron flux at an extended target surface has been designed, built, and tested. The simple and unique configuration of the electron gun combined with its low energy, high current, and uniform electron flux properties make it suitable for electron‐stimulated desorption studies on extended surfaces requiring uniform bombardment over centimeter dimensions.

 

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