Effect of irradiation temperature on Si amorphization process
作者:
E.C. Baranova,
V.M. Gusev,
Yu.V. Martynenko,
I.B. Haibullin,
期刊:
Radiation Effects
(Taylor Available online 1975)
卷期:
Volume 25,
issue 3
页码: 157-162
ISSN:0033-7579
年代: 1975
DOI:10.1080/00337577508235384
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Some questions of the amorphization mechanism of semiconductors during ion bombardment have been considered theoretically. The probability of the formation of crystalline disordered regions (CDR) and amorphous regions (AR)1has been calculated as a function of irradiation temperature T, atomic number Zi and ion enerw. It has been shown that the role of CDR in the amorphization process increases with the increase of T and decrease of Mi. The effect of irradiation temperature (T = −150, +25 and +1OO°C) on the silicon amorphization process during bombardment by light (B12), mean (Ne20) and heavy (Sb121) ions has been studied by various techniques: ir-absorption, ir-reflection and fast electron diffraction. It has been shown that the influence of irradiation temperature is stronger for light ions and large values ofT. Theoretical results are in good agreement with experimental ones.
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