Calibration of the electrical response of piezoelectric elements at low voltage using laser interferometry
作者:
E. Riis,
H. Simonsen,
T. Worm,
U. Nielsen,
F. Besenbacher,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 54,
issue 25
页码: 2530-2531
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101064
出版商: AIP
数据来源: AIP
摘要:
A laser interferometric method is described by which the length‐to‐voltage sensitivity of piezoelectric elements, as used e.g., in scanning tunneling microscopes, can be calibrated. The method is based on measuring the optical frequency of a laser locked to a piezoelectrically tuned interferometer, relative to a stable reference. The high sensitivity of this technique allows the calibration to be carried out in the low‐voltage regime.
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