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All metal bakeable piezoelectric valve

 

作者: Dan Marescaux,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 7  

页码: 2412-2413

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144698

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An ultrahigh vacuum leak valve is described, which can be baked up to 450 °C. The throughput can be adjusted between 1×10−10and 5×10−6Pa m3 s−1. The actuator is a piezoelectric stack which can be easily removed and set back. The baking temperature with the actuator in place is limited by the thermal specifications of the piezoelectric material. The inner surfaces, which are solely stainless‐steel and gold, allow an almost unlimited choice of working gases.

 

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