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Measurements of angular evaporation characteristics of sources

 

作者: J. A. Dobrowolski,   M. Ranger,   R. L. Wilkinson,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1983）
卷期: Volume 1, issue 3  

页码: 1403-1408

 

ISSN:0734-2101

 

年代: 1983

 

DOI:10.1116/1.572030

 

出版商: American Vacuum Society

 

关键词: evaporation;angular distribution;thin films;quartz;measuring methods;measuring instruments;fabrication

 

数据来源: AIP

 

摘要:

An apparatus is described for the rapid and reliable measurement of the angular evaporation characteristics of sources. It consists of a moving and a stationary quartz crystal evaporation rate monitor, and it can be operated at any chosen azimuth angle. The instrument has been used to demonstrate the effect of source design, rate of evaporation, external obstructions, and evaporant material on the angular evaporation characteristics of high rate, high capacity evaporation sources.

 

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