In technology intense (propagation without space‐charge neutralization is impossible) ion beams of low energy (<1 keV) are often used. In this energy range neutralization as a result of ambient gas ionization immediately by ions is not effective. Different channels of electron appearing have been investigated by authors experimentally and theoretically with different modes of neutralization. Detail probe measurements of electron temperature and energy distribution, electron and ion densities, plasma potential have been carried out. On the basis of the experimental results a self‐consistent theoretical model has been developed. The electron temperature and plasma potential are calculated from self‐consistent energy and particle balance equations. The energy distribution of plasma electrons is found using the Fokker–Planck equation. All theoretical results are given in comparison with experimental data.