Thin‐film bolometer with fast response
作者:
M. Regelsberger,
R. Wernhardt,
M. Rosenberg,
期刊:
Review of Scientific Instruments
(AIP Available online 1987)
卷期:
Volume 58,
issue 2
页码: 276-278
ISSN:0034-6748
年代: 1987
DOI:10.1063/1.1139321
出版商: AIP
数据来源: AIP
摘要:
A short summary on recent developments in semiconducting temperature sensors is given. A thin‐film germanium resistor is described in detail, which is used for fast and accurate thermometry in a nonadiabatic microcalorimeter. The use of only standard vapor deposition techniques makes this sensor also available to research groups lacking access to semiconductor technology. The general good performance and its good mechanical properties have the potential of numerous applications in fast and accurate low‐temperature thermometry.
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