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Thin‐film bolometer with fast response

 

作者: M. Regelsberger,   R. Wernhardt,   M. Rosenberg,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1987)
卷期: Volume 58, issue 2  

页码: 276-278

 

ISSN:0034-6748

 

年代: 1987

 

DOI:10.1063/1.1139321

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A short summary on recent developments in semiconducting temperature sensors is given. A thin‐film germanium resistor is described in detail, which is used for fast and accurate thermometry in a nonadiabatic microcalorimeter. The use of only standard vapor deposition techniques makes this sensor also available to research groups lacking access to semiconductor technology. The general good performance and its good mechanical properties have the potential of numerous applications in fast and accurate low‐temperature thermometry.

 

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