Imaging of submicron index variations by scanning optical tunneling
作者:
Daniel Courjon,
Claudine Bainier,
Michel Spajer,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 6
页码: 2436-2439
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.586036
出版商: American Vacuum Society
关键词: SCANNING LIGHT MICROSCOPY;SPATIAL RESOLUTION;POLARIZATION;IMAGE FORMING;SENSITIVITY
数据来源: AIP
摘要:
The scanning tunneling optical microscope (SNOM, STOM, PSTM, etc.) is the equivalent of the electron scanning tunneling microscope in the electromagnetic domain. Although it was born at the same time, its actual development is more recent. Here, some new results obtained with the version working in total reflection (STOM/PSTM) are reported. A grating of a periodicity of 417 nm and a thickness of 5 nm have been imaged both in TM and TE modes. It is first noted that the optical image is well resolved. Furthermore, the difference of behavior of the field versus the polarization of the incident light has been shown. More precisely, the TM mode seems to be highly sensitive to small index and topography variations due to surface contaminants. Such effects are generally not imaged by atomic force microscopy working in attractive mode, because they affect the surface topography slightly. The SNOM could be thus a very powerful tool for detecting pollutants over the surface of objects like glasses, lenses, gratings, etc., and in the biology domain.
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