Raman spectra of thin film GexSe1−x(x= 0.1, 0.33) glasses shows them to be structurally and compositionally similar on a molecular scale whether prepared by evaporation or sputtering techniques. Their sensitivity as silver‐doped photoresist materials correlates directly with information obtained from backscattering Raman experiments on the initially prepared films. Low sensitivity in some films prepared by sputtering onto low‐temperature substrates is attributed to film contamination, probably by oxygen containing impurities or by other materials that inhibit formation of optically absorbing Ge–Se bonding networks.