Low-cost all-polymer integrated circuits
作者:
C. J. Drury,
C. M. J. Mutsaers,
C. M. Hart,
M. Matters,
D. M. de Leeuw,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 73,
issue 1
页码: 108-110
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121783
出版商: AIP
数据来源: AIP
摘要:
A technology has been developed to make all polymer integrated circuits. It involves reproducible fabrication of field-effect transistors in which the semiconducting, conducting and insulating parts are all made of polymers. The fabrication on flexible substrates uses spin-coating of electrically active precursors and patternwise exposure of the deposited films. In the whole process stack integrity is maintained. Vertical interconnects are made mechanically. As a demonstrator functional 15-bit programmable code generators are fabricated. These circuits still operate when the foils are sharply bent. Due to the limited number of process steps the technology is potentially inexpensive. ©1998 American Institute of Physics.
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