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Heavy ion implantation in diamond

 

作者: M. Teicher,   R. Beserman,  

 

期刊: Journal of Applied Physics  (AIP Available online 1982)
卷期: Volume 53, issue 3  

页码: 1467-1469

 

ISSN:0021-8979

 

年代: 1982

 

DOI:10.1063/1.330642

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Antimony and nitrogen have been implanted at room temperature in type Ia diamonds. From the EPR spectrum we can deduce that for small implantation doses isolated broken bonds are created. Multiple defects are created for implantation dosesD(Sb) = 2–5×1013ions/cm2andD(N) = 5×1014ions/cm2. For higher implantation doses single broken bonds prevail. Complete graphitization is obtained for high doses:D(Sb)⩾5×1015ions/cm2andD(N)⩾1016ions/cm2. In antimony doped diamonds the conductivity is only due to defects.

 

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