Heavy ion implantation in diamond
作者:
M. Teicher,
R. Beserman,
期刊:
Journal of Applied Physics
(AIP Available online 1982)
卷期:
Volume 53,
issue 3
页码: 1467-1469
ISSN:0021-8979
年代: 1982
DOI:10.1063/1.330642
出版商: AIP
数据来源: AIP
摘要:
Antimony and nitrogen have been implanted at room temperature in type Ia diamonds. From the EPR spectrum we can deduce that for small implantation doses isolated broken bonds are created. Multiple defects are created for implantation dosesD(Sb) = 2–5×1013ions/cm2andD(N) = 5×1014ions/cm2. For higher implantation doses single broken bonds prevail. Complete graphitization is obtained for high doses:D(Sb)⩾5×1015ions/cm2andD(N)⩾1016ions/cm2. In antimony doped diamonds the conductivity is only due to defects.
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