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Vacuum Arcs as Vapor Sources

 

作者: T. Utsumi,  

 

期刊: Journal of Vacuum Science and Technology  （AIP Available online 1972）
卷期: Volume 9, issue 1  

页码: 37-37

 

ISSN:0022-5355

 

年代: 1972

 

DOI:10.1116/1.1316620

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

Vacuum arcs are discussed from the aspect of vapor sources on the basis of a recent investigation of various ejected species, such as metal atoms, ions and molten metal particles, and their energy or velocity spectra for about 30 different metals and alloys.

 

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