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Erratum: Deep‐etch silicon mm‐waveguide structure for the relativistic acceleration of electrons [J. Vac. Sci. Technol. B14, 2524 (1996)]

 

作者: T. L. Willke,   A. D. Feinerman,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 6  

页码: 3605-3605

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.588736

 

出版商: American Vacuum Society

 

数据来源: AIP

 

 

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