Grain size dependence of electromigration‐induced failures in narrow interconnects
作者:
J. Cho,
C. V. Thompson,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 54,
issue 25
页码: 2577-2579
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101054
出版商: AIP
数据来源: AIP
摘要:
Measurements of the median time to failure (MTTF) and deviation in the time to electromigration‐induced failure (DTTF) of Al alloy thin‐film lines are reported. As the ratio of the linewidth to the grain size decreases, MTTF decreases to a minimum and then increases exponentially. DTTF continuously increases. We show that serial and parallel failure unit models can be used to explain the grain size and linewidth dependence of the MTTF and DTTF for interconnects. We further note that extrapolation to low cumulative failures based on serial failure models must be based on knowledge of the failure statistics of individual units.
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