Scattering and recoiling imaging spectrometer (SARIS)
作者:
C. Kim,
C. Ho¨fner,
A. Al-Bayati,
J. W. Rabalais,
期刊:
Review of Scientific Instruments
(AIP Available online 1998)
卷期:
Volume 69,
issue 4
页码: 1676-1684
ISSN:0034-6748
年代: 1998
DOI:10.1063/1.1148826
出版商: AIP
数据来源: AIP
摘要:
An ultrahigh vacuum spectrometer system has been designed and constructed for obtaining spatial- and time-resolved, element-specific images of atoms that are scattered and recoiled from surfaces. A pulsed noble gas ion beam in the 1–5 keV range is used to scatter and recoil atoms from a surface. A large, position-sensitive microchannel plate detector with resistive anode encoder, that is sensitive both to ions and fast neutrals records the spatial distribution patterns of the emitted atoms. The use of time-of-flight methods allows capture of these patterns in time windows as short as 10 ns. The sensitivity of these patterns to the details of surface structure provides the basis for a scattering and recoiling imaging spectrometry (SARIS). The primary ion beam current is∼0.1 nA/cm2,supplied in 20 ns pulses at a rate of 30 kHz, resulting in∼5×102 ions/pulse;images with adequate statistics can be obtained in several seconds with a total ion dose of<1010 ions/cm2.The SARIS technique can provide unique, element-specific, real-space, surface structural information at a resolution of<0.1 Åon a time scale of seconds for analysis of surface composition, structure, and dynamics. Examples provided for demonstrating the capabilities of the system are 4 keVHe+andAr+scattering and recoiling from Pt{111} and 4 keVKr+scattering and recoiling from CdS{0001}. ©1998 American Institute of Physics.
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