Probe diagnostics of non‐Maxwellian plasmas
作者:
V. A. Godyak,
R. B. Piejak,
B. M. Alexandrovich,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 73,
issue 8
页码: 3657-3663
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.352924
出版商: AIP
数据来源: AIP
摘要:
Various probe diagnostic methods have been applied to rf plasmas with non‐Maxwellian electron energy distribution functions (EEDF) and the results of these diagnostic methods have been compared. Plasma density and electron temperature were obtained using standard procedures from the electron retardation region (classic Langmuir method), the ion saturation region, and the electron saturation region of the measured probeI/Vcharacteristic. Measurements were made in a 13.56‐MHz capacitive argon rf discharge at two gas pressures:p=0.03 Torr, where stochastic electron heating is dominant, andp=0.3 Torr, where collisional electron heating dominates. Thus, the measured EEDF at each gas pressure manifests a distinct departure from thermodynamic equilibrium being bi‐Maxwellian at 0.03 Torr and Druyvesteyn‐like at 0.3 Torr. Considerable differences in electron density and temperature were obtained from the different parts of the probe characteristic and these values differ dramatically in many cases from those found from integration of the measured EEDF’s, thus demonstrating that using standard procedures in non‐Maxwellian plasma can give misleading results.
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