Thin film transistors for large area electronics
作者:
Malcolm J. Thompson,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1984)
卷期:
Volume 2,
issue 4
页码: 827-834
ISSN:0734-211X
年代: 1984
DOI:10.1116/1.582902
出版商: American Vacuum Society
关键词: TRANSISTORS;FABRICATION;LIQUID CRYSTALS;USES;SILICON;PERFORMANCE;REVIEWS;THIN FILMS;SEMICONDUCTOR TECHNOLOGY
数据来源: AIP
摘要:
This paper reviews thin film transistor technology with a detailed emphasis on amorphous silicon (a‐Si:H) devices. The fabrication and large area technology issues are described. The materials parameters that affect device performance are dominated by interface effects and the gate dielectric. The problem of characterizing the interfaces is discussed. Applications in liquid crystal displays (LCD) and image sensors are described. It is concluded that there is considerable promise for this rapidly expanding technology.
点击下载:
PDF
(656KB)
返 回