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Thin film transistors for large area electronics

 

作者: Malcolm J. Thompson,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1984)
卷期: Volume 2, issue 4  

页码: 827-834

 

ISSN:0734-211X

 

年代: 1984

 

DOI:10.1116/1.582902

 

出版商: American Vacuum Society

 

关键词: TRANSISTORS;FABRICATION;LIQUID CRYSTALS;USES;SILICON;PERFORMANCE;REVIEWS;THIN FILMS;SEMICONDUCTOR TECHNOLOGY

 

数据来源: AIP

 

摘要:

This paper reviews thin film transistor technology with a detailed emphasis on amorphous silicon (a‐Si:H) devices. The fabrication and large area technology issues are described. The materials parameters that affect device performance are dominated by interface effects and the gate dielectric. The problem of characterizing the interfaces is discussed. Applications in liquid crystal displays (LCD) and image sensors are described. It is concluded that there is considerable promise for this rapidly expanding technology.

 

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