Nanostructures consisting ofC60molecules were fabricated on a GaSe/MoS2heterostructure. A submonolayer film of a lamellar compound semiconductor GaSe was grown on aMoS2substrate to form nanoscale holes or grooves surrounded by monolayer steps. Atomic force microscope (AFM) observation indicates thatC60molecules grow only in the bareMoS2nanoregions at a substrate temperature of 180 °C.C60molecules fill up those holes and grooves, and nanoscaleC60domains with polygonal shapes can be formed. This selective growth method can be combined with nanoscale patterning made by a scanning tunneling microscope or AFM to produce nanostructures of molecular crystals with designed shapes.©1997 American Institute of Physics.