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Techniques for using emitting probes for potential measurement in rf plasmas

 

作者: E. Y. Wang,   N. Hershkowitz,   T. Intrator,   C. Forest,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1986)
卷期: Volume 57, issue 10  

页码: 2425-2431

 

ISSN:0034-6748

 

年代: 1986

 

DOI:10.1063/1.1139088

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Investigations of the effects of rf on plasma potential measurements with electron emitting probes and methods for interpreting data are presented. Techniques correspond to the floating and inflection point methods of single‐emitting and differential emitting probes, respectively. A simple method of measurement of plasma potential fluctuations is given which makes use of time‐averaged emitting probeI–Vcharacteristics.

 

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