Techniques for using emitting probes for potential measurement in rf plasmas
作者:
E. Y. Wang,
N. Hershkowitz,
T. Intrator,
C. Forest,
期刊:
Review of Scientific Instruments
(AIP Available online 1986)
卷期:
Volume 57,
issue 10
页码: 2425-2431
ISSN:0034-6748
年代: 1986
DOI:10.1063/1.1139088
出版商: AIP
数据来源: AIP
摘要:
Investigations of the effects of rf on plasma potential measurements with electron emitting probes and methods for interpreting data are presented. Techniques correspond to the floating and inflection point methods of single‐emitting and differential emitting probes, respectively. A simple method of measurement of plasma potential fluctuations is given which makes use of time‐averaged emitting probeI–Vcharacteristics.
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