Submicrometer resolution replication of relief patterns for integrated optics
作者:
G. D. Aumiller,
E. A. Chandross,
W. J. Tomlinson,
H. P. Weber,
期刊:
Journal of Applied Physics
(AIP Available online 1974)
卷期:
Volume 45,
issue 10
页码: 4557-4562
ISSN:0021-8979
年代: 1974
DOI:10.1063/1.1663087
出版商: AIP
数据来源: AIP
摘要:
We report on three techniques for replicating relief patterns in dielectric materials for use as substrates for planar integrated optical circuits: embossing with a metal die; casting from a metal die; and casting from a rubber mold. Techniques for overcoating the substrates with light‐guiding films and filling of grooves are also described. Measured losses in sheet film guides were ≤0.5 dB/cm. Guiding was also observed in narrow light guides fabricated by each technique. Embossing is the simplest process, but for small‐scale production the casting processes are simpler to implement.
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