Modification of PZT nucleation and growth using oxide layer in multi-layered electrodes
作者:
Ilsub Chung,
J.K. Lee,
I.K. Yoo,
SeshuB. Desu,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1995)
卷期:
Volume 10,
issue 1-4
页码: 99-111
ISSN:1058-4587
年代: 1995
DOI:10.1080/10584589508012268
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The ferroelectric properties of PZT on RuO2electrodes were compared to those on RuO2/Pt electrodes. The better hysteretic properties were obtained from Pt/RuO2/PZT/RuO2/Pt ferroelectric capacitors. The enhancement of ferroelectric properties is likely attributed to the modification in the microstructure of PZT film. The interfacial modification would be affected by the factors such as surface roughness, stress, and porosity of RuO2film. As the result of the interfacial modification, better quality PZT films are produced, thereby resulting in better ferroelectric properties. We made an effort to understand the relationship between the grain size and the coercive voltage in terms of the domain formation and the domain pinning in connection with defects like grain boundaries.
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