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Studies of substrate materials for PZT thin films

 

作者: Akira Tanaka,   SeungChul Choi,   Masaru Miyayama,   AmarS. Bhallaß,   Hiroaki Yanagida,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1993）
卷期: Volume 3, issue 1  

页码: 51-57

 

ISSN:1058-4587

 

年代: 1993

 

DOI:10.1080/10584589308216699

 

出版商: Taylor & Francis Group

 

关键词: lead zirconate titanate;perovskite;sol-gel;thin film;substate;orientation

 

数据来源: Taylor

 

摘要:

Perovskite single phase PZT (53/47) thin films were deposited on several potential substrate materials by the sol-gel method and subsequent heat treatment at 700[ddot]C for 10 minutes. (100) lanthanum aluminate substrate was found to be the most effective to produce a PZT (100) epitaxial film. (100) strontium titanate and strontium lanthanum galate also gave very high degree of (100) oriented (96–98%) PZT thin films.

 

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