Using an optical‐transmission method, the deposition of sputtered Ni atoms on a glass collector in an abnormal glow discharge is measured in Ar and Ar‐H2mixture at 5 Torr. The distribution of atoms deposited on a glass collector is found to be determined by the diffusion process of sputtered atoms in the gases. The results show that the sputtering rate is proportional to the square of the current, and the sputtering rate of 100% Ar is about twice as large as that of 70% Ar‐30% H2mixture.