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Electro‐optical effect in aluminum nitride waveguides

 

作者: P. Gra¨upner,   J. C. Pommier,   A. Cachard,   J. L. Coutaz,  

 

期刊: Journal of Applied Physics  （AIP Available online 1992）
卷期: Volume 71, issue 9  

页码: 4136-4139

 

ISSN:0021-8979

 

年代: 1992

 

DOI:10.1063/1.350844

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We fabricated thin optical layers in aluminum nitride by magnetron sputtering. Using the techniques of integrated optics, we characterized the layers and we determined the electro‐optic coefficients of AlN:r13= 0.67 pm/V andr33= −0.59 pm/V.

 

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