MgTiO3thin films have been grown on various substrates by pulsed laser deposition (PLD) to investigate the application for microwave dielectrics and optical devices. Highly oriented MgTiO3thin films were obtained on sapphire (c-plane Al2O3). MgTiO3thin films deposited on SiO2/Si and platinized silicon (Pt/Ti/SiO2/Si) substrates were polycrystalline nature. MgTiO3thin films grown on sapphire were transparent in the visible and had a sharp absorption edge at 280 nm. These MgTiO3thin films had extremely fine feature of surface morphology, i.e., rms roughness of 0.87 nm. Dielectric constant and loss of MgTiO3thin films deposited by PLD were about 24 and 1.5% at 1MHz, respectively. These MgTiO3thin films also exhibited little dielectric dispersion.