Operation limits of multipole ion sources
作者:
A. P. H. Goede,
T. S. Green,
期刊:
Physics of Fluids(00319171)
(AIP Available online 1982)
卷期:
Volume 25,
issue 10
页码: 1797-1810
ISSN:0031-9171
年代: 1982
DOI:10.1063/1.863657
出版商: AIP
数据来源: AIP
摘要:
Experiments in which the effective anode area of a multipole ion source is reduced, in order to enhance its ionization and gas efficiency, show that there is a minimum area below which efficient operation becomes impossible. This phenomena is analyzed in terms of a model based on particle balance equations and is shown to be closely related to the reversal in plasma potential with respect to anode potential. The theoretically predicted operation regime is shown to be in reasonable agreement with that found in a variety of multipole sources. Comparison is also made with the limitations set by cathode area.
点击下载:
PDF
(1209KB)
返 回