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Generation of a Low Flow Atmospheric Pressure Neon ICP

 

作者: Thomas Manning,   Glenn Bentley,   Byron Palmer,   Doug Hof,  

 

期刊: Spectroscopy Letters  （Taylor Available online 1989）
卷期: Volume 22, issue 3  

页码: 341-344

 

ISSN:0038-7010

 

年代: 1989

 

DOI:10.1080/00387018908053883

 

出版商: Taylor & Francis Group

 

关键词: Neon;Inductively Coupled Plasma;Emission Spectroscopy

 

数据来源: Taylor

 

摘要:

A 27.12 MHz low flow (3 1/min), laminar flow, atmospheric pressure neon ICP has been generated. The forward power used is 500 W with a reflected power of less than 5 W. Using higher powers caused the plasma to either extinguish or form numerous filaments. The Hß line is used to determine an electron number density of 8 × 1013cm−3. The N2+(0, 0) and OH(0, 0) transitions did not readily emit. This fact, coupled with the low electron density and low input power, indicates a relatively cool plasma.

 

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