Electron beam prober for VLSI diagnosis
作者:
Y. Furukawa,
Y. Goto,
A. Ito,
T. Ishizuka,
K. Ozaki,
T. Inagaki,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1985)
卷期:
Volume 3,
issue 3
页码: 874-878
ISSN:0734-211X
年代: 1985
DOI:10.1116/1.583075
出版商: American Vacuum Society
关键词: VLSI;ELECTRON BEAMS;ELECTRIC PROBES;ELECTRIC POTENTIAL;OPERATION;ELECTRICAL FAULTS;FABRICATION;ELECTRICAL TESTING;DESIGN;RESOLUTION;ELECTRON COLLISIONS
数据来源: AIP
摘要:
An electron beam (EB) prober for VLSI internal diagnosis has been developed. The essential requirements for an EB prober are quantitative voltage measurement, waveform observation with high time resolution, and a diagnostic function for locating faults easily. The newly developed EB prober satisfies these requirements. It has an improved energy analyzer for quantitative voltage measurement, a stroboscopic function with 1 ns time resolution, and a unique diagnostic function wherein voltage images of LSIs are compared. This voltage image comparison provides easy detection of faulty areas by comparing voltage images of both faulty and normal LSIs. In this respect this EB prober is the first machine which considers locating faults easily in a large VLSI chip.
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