The use of ‘‘mixed’’ beams in microprobe imaging
作者:
A. Saint,
M. B. H. Breese,
G. J. F. Legge,
期刊:
Review of Scientific Instruments
(AIP Available online 1996)
卷期:
Volume 67,
issue 8
页码: 2940-2946
ISSN:0034-6748
年代: 1996
DOI:10.1063/1.1147076
出版商: AIP
数据来源: AIP
摘要:
This article will demonstrate the production and application of ‘‘mixed’’ beams for a magnetically focused nuclear microprobe. A ‘‘mixed’’ beam is defined as any two beams of ions of different species, or energy, or both that can be quickly and easily made to have the same magnetic rigidity (Rm) so that they transport, focus, and scan the same in a magnetic nuclear microprobe. Two techniques for the production of such beams will be presented. These methods include the extraction of different ions from the same source and scanning the terminal potential to produce the sameRm, and the use of a postacceleration stripper to change the charge state of one ion species to give it the sameRmas another ion species. The application of mixed beams to ion beam induced charge, scanning transmission ion microscopy, and ion microlithography will also be presented. ©1996 American Institute of Physics.
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