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Detection of sulfur dimers in SF6and SF6/O2plasma‐etching discharges

 

作者: K. E. Greenberg,   P. J. Hargis,  

 

期刊: Applied Physics Letters  （AIP Available online 1989）
卷期: Volume 54, issue 14  

页码: 1374-1376

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101404

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Sulfur dimers were detected in sulfur‐hexafluoride plasma‐etching discharges using optical emission spectroscopy and laser‐induced fluorescence spectroscopy. Dimer densities were estimated to be on the order of 1013/cm3and appear to decrease rapidly with increasing oxygen content in the discharge.

 

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