Thin films of lead zirconate titanate having the composition Pb1.05(Zr0.53Ti0.47)O3were deposited by a solgel method on a set of crystalline and amorphous substrates. The thickness of the film was varied by controlling the sol concentration or by repeated coatings. Factors controlling phase formation in the films such as nature of the substrate material, film thickness, chemical composition of the film, heating rate and gaseous atmosphere during the heat treatment were studied. On glass substrates the pyrochlore phase was obtained in thin (0.4 um) films and the perovskite phase in thicker (>1.5 um) films. Crystalline substrates (except Si and stainless steel) yielded a perovskite phase in 0.6 um thick film. Low Zr/Ti ratio, rapid heating and introduction of nitrogen in the later stage of heat treatment also favoured the formation of the perovskite phase. It is shown that Pb deficiency in the film caused by diffusion of Pb into amorphous substrates or by other mechanisms is primarily responsible for inhibiting the pyrochlore to perovskite transformation. The initial crystallisation of the amorphous film into pyrochlore rather than a perovskite phase (as in powders) is proposed to be due to higher strain energy barrier which exists for the amorphous to perovskite transformation in the film.