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High deposition rate laser direct writing of Al on Si

 

作者: H. W. Lee,   S. D. Allen,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 58, issue 19  

页码: 2087-2089

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.105019

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report, for the first time, the direct write laser patterning of highly conductive Al from a liquid precursor, triisobutylaluminum (TIBA). Al wires were written on Si with a scanned Ar+laser from liquid TIBA at speeds of up to several mm/s. Wires 3 &mgr;m wide by 1 &mgr;m high with a resistivity of 5.6 &mgr;&OHgr; cm were routinely achievable.

 

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