High deposition rate laser direct writing of Al on Si
作者:
H. W. Lee,
S. D. Allen,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 19
页码: 2087-2089
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105019
出版商: AIP
数据来源: AIP
摘要:
We report, for the first time, the direct write laser patterning of highly conductive Al from a liquid precursor, triisobutylaluminum (TIBA). Al wires were written on Si with a scanned Ar+laser from liquid TIBA at speeds of up to several mm/s. Wires 3 &mgr;m wide by 1 &mgr;m high with a resistivity of 5.6 &mgr;&OHgr; cm were routinely achievable.
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