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The effect of multiple laser pulses on damage to thin metallic films

 

作者: S. S. Cohen,   J. B. Bernstein,   P. W. Wyatt,  

 

期刊: Journal of Applied Physics  (AIP Available online 1992)
卷期: Volume 71, issue 2  

页码: 630-637

 

ISSN:0021-8979

 

年代: 1992

 

DOI:10.1063/1.351347

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The mechanical effects due to the application of multiple laser pulses to thin metallic films are studied. Particular attention is paid to systems involving thin aluminum films deposited on an insulating substrate such as silica. This film/substrate combination is widely employed in silicon semiconductor technology. In building such devices laser energy is sometimes used for the purpose of cutting conducting lines, while in other applications it is used to effect linking between two levels of metallization. Both processes have been greatly facilitated by employing a multiple‐pulse scheme. The mechanism responsible for this effect is discussed and it is shown how the present model leads to a good agreement between the measured and calculated quantities.

 

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