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Micropulsed ion source via self-sputtering avalanche

 

作者: Spilios Riyopoulos,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1998)
卷期: Volume 69, issue 1  

页码: 69-75

 

ISSN:0034-6748

 

年代: 1998

 

DOI:10.1063/1.1148480

 

出版商: AIP

 

数据来源: AIP

 

摘要:

In the proposed pulsed ion source, a steady-state sputtering avalanche sustained by secondary ions locked in phase with an ac voltage applied between plates creates high current bunches with energy monochromaticity and ion purity. In a two-surface cascade, the average current exhibits a Child–Langmuir-like scaling, due to the dynamical constraints on the normalized ac voltage. A single-surface cascade, using a bending magnetic field, operates with unconstrained voltage and exhibits much lower heat load for given current, as well as the ability for average current in excess of the Child–Langmuir limit. The pulsed source is particularly attractive for ion beams of solid materials with high vaporization temperature. ©1998 American Institute of Physics.

 

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