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The energy distribution of sputtered atoms from gold

 

作者: G.E. Chapman,   B.W. Farmery,   M.W. Thompson,   I.H. Wilson,  

 

期刊: Radiation Effects  （Taylor Available online 1972）
卷期: Volume 13, issue 1-2  

页码: 121-129

 

ISSN:0033-7579

 

年代: 1972

 

DOI:10.1080/00337577208231169

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The energy spectra of atoms sputtered from a gold target have been measured as a function of ion energy and species for target temperatures in the range 100 to 1200°K. Both single crystal and polycrystal targets have been used, with surface topography monitored by a scanning electron microscope.

 

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