Effects of temperature and bias on the microstructure of plasma‐deposited amorphous silicon carbide
作者:
Hsueh Yi Lu,
Mark A. Petrich,
期刊:
Journal of Applied Physics
(AIP Available online 1992)
卷期:
Volume 72,
issue 5
页码: 2054-2056
ISSN:0021-8979
年代: 1992
DOI:10.1063/1.351634
出版商: AIP
数据来源: AIP
摘要:
We report a new method of depositing amorphous hydrogenated silicon carbide (a‐SiC:H) at low substrate temperature in a plasma‐enhanced chemical vapor deposition reactor. By applying an external dc voltage to the rf‐excited powered electrode, we can shift the optimal deposition temperature from 250 °C to as low as 100 °C. We find thata‐SiC:H films deposited at positive powered‐electrode potential and low substrate temperature exhibit less microstructure, wider optical band gaps, and faster deposition rates than films deposited at conventional conditions.
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