Luminescence in hydrogenated amorphous carbon films grown by dc saddle‐field glow‐discharge decomposition of methane
作者:
F. Gaspari,
R. V. Kruzelecky,
P. K. Lim,
L. S. Sidhu,
S. Zukotynski,
期刊:
Journal of Applied Physics
(AIP Available online 1996)
卷期:
Volume 79,
issue 5
页码: 2684-2688
ISSN:0021-8979
年代: 1996
DOI:10.1063/1.361139
出版商: AIP
数据来源: AIP
摘要:
Photoluminescence in hydrogenated amorphous carbon thin films deposited using the dc saddle‐field glow‐discharge technique onto glass and single‐crystal silicon substrates was studied. Samples prepared using positive substrate bias exhibited strong broad‐band photoluminescence at room temperature. The luminescence spectrum had a major peak at 1.9 eV and two smaller peaks at 2.3 and 2.6 eV. Samples prepared using grounded or negatively biased substrates exhibited only weak photoluminescence near 2.6 eV. Infrared spectroscopy indicates that the luminescence at 1.9 and 2.3 eV is related to the presence of C–OH bonds, whereas the photoluminescence at 2.6 eV appears to be an intrinsic property of thea‐C:H films. ©1996 American Institute of Physics.
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