Sputter deposited titanium disilicide at high substrate temperatures
作者:
M. Tanielian,
S. Blackstone,
R. Lajos,
期刊:
Applied Physics Letters
(AIP Available online 1984)
卷期:
Volume 45,
issue 4
页码: 444-446
ISSN:0003-6951
年代: 1984
DOI:10.1063/1.95252
出版商: AIP
数据来源: AIP
摘要:
Titanium disilicide films were sputter deposited from a composite TiSi2.1target on 〈111〉 bare silicon wafers both at room temperature and at 600 °C. The room temperature as‐deposited films require a 900 °C sintering step to reduce their resistivity. On the other hand, the as‐deposited 600 °C films are fully reacted, polycrystalline, have no oxygen contamination, large grain sizes, and are oxidation resistant. Further annealing of these films at 900 °C produces no changes in their crystal structure, composition, resistivity, or grain size.
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